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MEMSnet Home: MEMS-Talk: Rectangular wafer cassettes
Rectangular wafer cassettes
2002-02-04
Eric Lagally
2002-02-05
Klauder, Jr., Philip R.
2002-02-05
Mac McReynolds
2002-02-05
Roger Brennan
2002-02-07
Liz Shelley
2002-02-08
Roger Brennan
Rectangular wafer cassettes
Liz Shelley
2002-02-07
Ggood question
Integris doesn't make the fixturing that we use every day, anymore, either.
Are they the only game in town?
Do we have any other options in the world?
Liz

> From: Roger Brennan 
> Reply-To: [email protected]
> Date: Tue, 5 Feb 2002 18:11:07 -0800
> To: "'[email protected]'" 
> Subject: RE: [mems-talk] Rectangular wafer cassettes
>
> Speaking of Fluoroware, does anybody know where I can buy some PFA type A71
> two inch wafer boats?  Fluoroware (excuse me, Entegris) quit making them.
>
> Thanks,
> roger brennan
>
> -----Original Message-----
> From: Mac McReynolds [SMTP:[email protected]]
> Sent: Tuesday, February 05, 2002 6:43 AM
> To: '[email protected]'
> Subject: RE: [mems-talk] Rectangular wafer cassettes
>
> Integris bought out Fluoroware, and, to the best of my knowledge, now
> carries the full line of teflon and plastic boxes, carriers, etch baskets,
> etc.  At least, that's where I buy them.
>
> Mac McReynolds
> R&D Manager
> Caliper Technologies Corp.
> 605 Fairchild Drive
> Mountain View, CA 94043-2234
> Tel:  650-623-0710
> Fax:  650-623-0521
>
>> ----------
>> From:  Eric Lagally
>> Reply To:  [email protected]
>> Sent:  Monday, February 4, 2002 3:34 PM
>> To:  [email protected]
>> Subject:  [mems-talk] Rectangular wafer cassettes
>>
>> Hi,
>>
>> We will be starting a project using rectangular
>> glass slides (25 x 75 mm and 21 x 75 mm), and we are
>> in need of ways to hold these slides for etching and
>> cleaning processes (HF, Pirahna, etc.).  Does anybody
>> know of a source for such things?  I know Entegris
>> sells custom-sizable carriers, but they are designed
>> for transport, and the materials they are made from
>> (i.e., stainless steel) aren't good in etches.  Any
>> help is appreciated.
>>
>> Eric
>>
>>
>>
>>
>> =====
>> Eric Lagally
>> UCB/UCSF Joint Bioengineering Graduate Group
>> Mathies Research Laboratory
>> 313 Lewis Hall
>> Berkeley, CA 94720
>> Great stuff seeking new owners in Yahoo! Auctions!
>> http://auctions.yahoo.com
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> _______________________________________________
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> _______________________________________________
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> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
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