Try a place in Chicago called FotoFab (www.fotofab.com). They can do wet
chemical etching of photolithographically patterned stainless steel. I would
try a stainless thickness of ~ 0.005" (125 um), which should be a good
compromise between rigidity and machinability. Note that the minimum feature
size is proportional to the thickness.
___________________________________________
Message: 8
Date: Wed, 6 Feb 2002 11:27:44 -0500 (EST)
From: Nirmal Govindaraju 
To: 
Subject: [mems-talk] Shadow Masks
Reply-To: [email protected]

Hi,

I'm a Graduate Student at North Carolina State University and I am looking
for some information on people who produce shadow masks. Please note that
I will be using the shadow masks to fabricate thin film resistors and
thermocouples on a substrate using e-beam evaporation.

Thank you.
Sincerely,
Nirmal Govindaraju