It's actually low. 0.0035 micron/min at 85C

Best Regards,
Rafiqul Islam


EV Group Inc.- Technology- Tel: (602) 437 9492 x 118, (602)2842134
(cell),Fax: (602) 437 9435,
e-mail: [email protected] web: www.EVGroup.com


-----Original Message-----
From: Brian Semak [mailto:[email protected]]
Sent: Friday, February 08, 2002 6:13 AM
To: [email protected]
Subject: [mems-talk] Si (111) etch rates


I would like to know if anyone has done or know of some results of the etch
rate of 111 planes in silicon, in KOH. The values I've found in the
litterature seems to low.

Med venlig hilsen/Kind regards

Brian S. Semak, M.Sc. (Phys.)
R&D Hermetic Packaging

Hymite Aps
DTU, Bygn. 325, 1st floor
2800 Lyngby

Telephone(Direct): + 45 4525 9147
Fax:                     + 45 4525 9156
E-mail: [email protected]
www.hymite.com
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