Dear All,

Su-8 is only sensitive to radiation below 400nm.  However, as Shay
mentioned, oftentimes broadband equipment will actually be capable of all
three (g-, h-, and i-line) bands.  SU-8 responds best to radiation between
350nm and 400nm, and is particularly sensitive to i-line.  Care must be
taken not to expose the SU-8 to any radiation below 350 nm, however, as the
material is also highly sensitive in this range, and will provide a
distorted profile.

A good site for information on SU-8 can be found at:

http://aveclafaux.freeservers.com/SU-8.html


Best Regards,

Chad Brubaker



EV Group-Technology, Tel: (602) 437 9492 x 119, Fax: (602) 437 9435
E-mail: [email protected]  ,  Web:
www.EVGroup.com  , 02/08/02

-----Original Message-----
From: shay kaplan [mailto:[email protected]]
Sent: Thursday, February 07, 2002 7:58 AM
To: [email protected]
Subject: Re: [mems-talk] SU-8 Resist Sensitivity


Dear Russel,
Wer'e exposing SU8 on a braod band tool. However, I belive it also has
quite a lot of energy in I-line. Any tools that does not specially cut the
400 and below will have it since the I-line of the Mercury arc lamp is very
energetic.

Shay Kaplan

[email protected] wrote:

> Is anyone using SU-8 with broadband exposure tools (g and h line)?  I
> understand that the resist is insensitive above 400nm.
>
> Russell Cox
> Process Engineer-Clare, Inc.
> 978-524-6846 Work Phone
> 978-479-2767 Cell Phone