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MEMSnet Home: MEMS-Talk: Thick SOI wafers
Cytoplex Biosciences, Inc.
2002-02-06
Alex Freeman
Thick SOI wafers
2002-02-11
Alok Paranjpye
2002-02-11
Kenneth Smith
Thick SOI wafers
Alok Paranjpye
2002-02-11
Hi Everyone,
I'm looking for bonded SOI wafers with a thick (10um+) top Si layer and 2-3
um BOX layer. I haven't been able to find any vendor that makes such thick
Si layers. I'd be grateful for any leads on this, or if somebody could tell
me what is the thickest Si layer available out there.
Thanks!!
Alok Paranjpye
Graduate Student Researcher
Mechanical & Environmental Engg.
University of California
Santa Barbara 93016
Ph:  805-893-5341
Fax: 805-893-8651

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