If you have requirements that cannot be
achieved using classic etching technology,
(size, tolerance etc.) DRC - Metrigraphics
can provide shadow masks with apertures
down to single micron sizes.


-Mike

_______________
Mike Bigelow

DRC - Metrigraphics
60 Concord Street
Wilmington, MA 01887   USA

Tel:  + (978) 658-6100  ext. 3063
Fax: + (978) 657-7765


-----Original Message-----
From: Barry Wissman [mailto:[email protected]]
Sent: Thursday, February 07, 2002 1:03 PM
To: [email protected]
Subject: RE: [mems-talk] Shadow Masks


Try a place in Chicago called FotoFab (www.fotofab.com). They can do wet
chemical etching of photolithographically patterned stainless steel. I would
try a stainless thickness of ~ 0.005" (125 um), which should be a good
compromise between rigidity and machinability. Note that the minimum feature
size is proportional to the thickness.
___________________________________________
Message: 8
Date: Wed, 6 Feb 2002 11:27:44 -0500 (EST)
From: Nirmal Govindaraju 
To: 
Subject: [mems-talk] Shadow Masks
Reply-To: [email protected]

Hi,

I'm a Graduate Student at North Carolina State University and I am looking
for some information on people who produce shadow masks. Please note that
I will be using the shadow masks to fabricate thin film resistors and
thermocouples on a substrate using e-beam evaporation.

Thank you.
Sincerely,
Nirmal Govindaraju
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