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MEMSnet Home: MEMS-Talk: Electroplating Gold
Electroplating Gold
2002-01-28
Igor Kadija
2002-01-29
David Nemeth
2002-01-29
Igor Kadija
2002-02-12
Abhinav Bhushan
2002-02-12
Igor Kadija
Electroplating Gold
Abhinav Bhushan
2002-02-12
Does it mean that electropolishing of gold is not possible?

Abhinav

On Wed, 30 Jan 2002, Igor Kadija wrote:

> It is true, Gold does not dissolve when used as an anode. That seems to be
> the generally accepted fact in electroplaters community. That makes it even
> more important to have a viable MEMS design including geometry of features
> and/or "dummy sites" and, a good control of the process including equipment,
> anode shape and location, mixing and solution quality.
>
> Igor Kadija
> [email protected]
>
>
> At 01:47 PM 1/29/02 -0500, you wrote:
> >I would only add to this that current density is not always uniform across
> >all plated areas if you have a photoresist mask and there are some very
> >small features and some larger features.  The current can distribute itself
> >so that the smaller features have a higher current density than the larger.
> >
> >Also, I'm not sure reverse pulse plating has any effect on gold - the gold
> >plates out of solution, but it does not plate back into solution if the
> >voltage is reversed.  (This is certainly true of the solution I use, which
> >is  Enthone BDT-200 - does anyone know if it's true for all solutions?)   In
> >other words, if you used a gold anode while plating, it would not lose any
> >mass.
> >
> >David Nemeth
> >Ph: (703) 961-9573 x206

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