V grooves in Si?  Use KoH with a low stress nitride mask. The width and the
depth of the groove will be determined by the width of the Nitride mask.  100
Si will stop at 54.7 degree angel.

-----Original Message-----
From: Jon Doe [mailto:[email protected]]
Sent: Monday, February 11, 2002 2:40 PM
To: [email protected]
Subject: [mems-talk] V groves generation


 Hi all:
Could anybody here give a simple receipe to generate V
groves.
I am sure this question has been asked here before.
May be somebody still has all the answers and could
forward them to me?

Thanks

Thomas


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