We use Cr as an adhesion layer, as stated before. When we etched in
KOH afterwards we found a lot of bubbles in the metal layer. This
improved a lot after after "sintering" at 300 deg C for a couple of
minutes under Nitrogen. We believe the Cr-layer "eats up" some of
the oxide. Maybe it also works with Titanium.

Alexander Hoelke
Graduate Student Electrical Engeneering
University of Cincinnati
MEMS Group
e-mail [email protected]