Try reflowing your resist to create a sloped profile. Depending on the resist
type and thickness you should be able to produce an after reflow angle on the
resist of around 60 degrees. Try 140 degrees C reflow temperature or maybe
higher. Using your SF6+O2 process should give you the slope you are looking
for with respect to the step coverage you are trying to achieve. If the rate
is too fast the slope will be too steep then you can try the CF4+02 which
should give an even higher angle due to less selectivity to the resist. If
you need anything else give me a call. Bob Henderson 480-558-1156