Sandra,
SPS in The Netherlands can supply heated, filtered and recirculating
Teflon baths, working very well both for TMAH an KOH Si etching.
Try their website:
http://www.sps-europe.com/
Good luck,
Knut
Knut Lian
Process Engineer
Wafer Fab Technology
SensoNor asa
PO Box 196, N-3192 Horten
Norway
http:\\www.sensonor.com
Tel: +47 33 03 50 68
Fax: +47 33 03 51 05
-----Original Message-----
From: Sandra Bermejo [mailto:[email protected]]
Sent: 13. februar 2002 12:40
To: [email protected]
Subject: [mems-talk] TMAH etching
Hi,
?Does anybody know how to buy a cabin to make a TMAH etch?
Thanks in advance,
Sandra
--
*********************************************************
Sandra Bermejo Broto
Assistant Professor
Electronic Engineering Department
Semiconductor Devices Group (GDS)
UPC-Campus Nord, C5
C/Jordi Girona, 1-3
E-08034 Barcelona
SPAIN
Phone: + 34 93 401 68 78
Fax: + 34 93 401 67 56
e-mail: [email protected]
*********************************************************
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