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MEMSnet Home: MEMS-Talk: Ultra-thick Electrodeposited Resists
Ultra-thick Electrodeposited Resists
2002-02-14
Whye-Kei Lye
2002-02-19
BERAUER,FRANK (HP-Singapore,ex7)
Ultra-thick Electrodeposited Resists
Whye-Kei Lye
2002-02-14
Hi all,

I am looking to use Shipley's PEPR 2400 electrodeposited positive resist
for making 200 - 200 micron thick coatings.  Does anyone know if this is
possible/realistic?  What sort of thicknesses are possible with this
resist?

Any insight would be greatly appreciated.

Thanks in advance,

yk

______________________________________________________________________________

Whye-Kei Lye, Ph.D.
Research Scientist
Department of Electrical and Computer Engineering
University of Virginia
434-982-2374
[email protected]
______________________________________________________________________________

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