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MEMSnet Home: MEMS-Talk: Positive resists for MEMS processing
Positive resists for MEMS processing
2002-02-18
[email protected]
2002-02-18
C. Suzanne Miller
Making metal clusters on Si substrate
2002-02-19
Junghoon Yeom
2002-02-18
Rohit Srivastava
2002-02-18
Jon Doe
2002-02-19
Liz Shelley
2002-02-19
Blunier, Stefan
2002-02-19
[email protected]
2002-02-19
[email protected]
2002-02-19
[email protected]
Positive resists for MEMS processing
[email protected]
2002-02-19
Thanks. Would you happen to have photo capabilities for 4" wafers to process
with this resist? We need about 10 wafers processed with a mask replicating
trenches from 2 micron to 50 micron. Bob Henderson 480-558-1156

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