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MEMSnet Home: MEMS-Talk: Is there a way to align two sides of wafer
Is there a way to align two sides of wafer
2002-02-19
Martin O. Patton
2002-02-19
StéphaneDURAND
2002-02-20
Vikas Gupta
2002-02-19
Eric Johnson
2002-02-19
Charles Ellis
2002-02-20
shay kaplan
2002-02-19
Kirsch Dave
2002-02-19
Luesebrink Helge
2002-02-19
Frank DiPiazza
2002-02-19
[email protected]
2002-02-19
BERAUER,FRANK (HP-Singapore,ex7)
Is there a way to align two sides of wafer
Luesebrink Helge
2002-02-19
Marty,

Probably not. Please find attached paper regarding face-to-face alignment.
http://www.electrochem.org/meetings/past/200/abstracts/symposia/p1/1470.pdf


Best regards,
Helge

                -----Original Message-----
                From:   Martin O. Patton [mailto:[email protected]]
                Sent:   Tuesday, February 19, 2002 9:33 AM
                To:     [email protected]
                Subject:        [mems-talk] Is there a way to align two
sides of wafer

                Dear Mems group,

                I have a single side mask aligner.  Is there a method by
which this aligner
                can be used to align features on both sides of the wafer?

                Thanks for your assistance.

                Marty

                Martin O. Patton
                Senior Research Engineer
                Essential Research Incorporated
                6410 Eastland Road
                Cleveland, Ohio 44142
                www.er.com
                (440) 816-9850
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