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MEMSnet Home: MEMS-Talk: Is there a way to align two sides of wafer
Is there a way to align two sides of wafer
2002-02-19
Martin O. Patton
2002-02-19
StéphaneDURAND
2002-02-20
Vikas Gupta
2002-02-19
Eric Johnson
2002-02-19
Charles Ellis
2002-02-20
shay kaplan
2002-02-19
Kirsch Dave
2002-02-19
Luesebrink Helge
2002-02-19
Frank DiPiazza
2002-02-19
[email protected]
2002-02-19
BERAUER,FRANK (HP-Singapore,ex7)
Is there a way to align two sides of wafer
[email protected]
2002-02-19
Try drilling holes through the wafer the you will have the same alignment
points on both sides

-----Original Message-----
From: Martin O. Patton [mailto:[email protected]]
Sent: Tuesday, February 19, 2002 7:33 AM
To: [email protected]
Subject: [mems-talk] Is there a way to align two sides of wafer


Dear Mems group,

I have a single side mask aligner.  Is there a method by which this aligner
can be used to align features on both sides of the wafer?

Thanks for your assistance.

Marty

Martin O. Patton
Senior Research Engineer
Essential Research Incorporated
6410 Eastland Road
Cleveland, Ohio 44142
www.er.com
(440) 816-9850
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