Re: microthermomechanical systems discussion group
Albert K. Henning
1996-07-17
Meg Hummon wrote:
>
> SUBJECT: microthermomechanical systems discussion group
>
> Various companies, universities and national labs are working on the challenge
> of realizing microthermomechanical systems. Although much attention is given
to
> microelectromechanical systems, less attention has been given to date to
> microengines and microcoolers....
I tend to be 'imprecise' about the word 'MEMS'. For me, MEMS = 'microfabricated
devices which are not pure integrated circuits'. As such,
MEMS includes sensors, actuators, and transducers related to any of the
following phenomena, and beyond: electrical; thermal; fluid;
mechanical; optical; magnetic; chemical; biological.
Do we really need a special group to focus on 'MTMS'? The bandwidth here
doesn't seem to be burdensome (despite the discussions from 6-9
months ago!), and I tend to glean useful information from the full breadth of
the discussion.
Al
--
Albert K. Henning, Ph.D. 415/617-0854 (Office)
Program Manager 415/326-9217 (FAX)
Redwood Microsystems [email protected]
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