A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Slow wet etch of GaAs?
Drill diameter 100um in thick glass wafer
2002-02-19
Dlee Li
2002-02-20
Vic Kley
2002-02-19
Michael D Martin
2002-02-19
Kenneth Smith
2002-02-21
Vic Kley
2002-02-21
Martin, Dick
2002-02-21
Vic Kley
Slow wet etch of GaAs?
2002-02-22
Xinbing Liu
2002-02-25
Nigel Sharma
Slow wet etch of GaAs?
Xinbing Liu
2002-02-22
Hi,

I need to remove about 60 nm thick of GaAs from a GaAs wafer.  I read
that GaAs can be wet etched in H2O2/H2SO4 solutions, but the etch rate
seems too high for me, couple of microns per minute.  Does anyone have a
recipe for slow etch so I can control the thickness removed?  I also
need smooth surface after etching.

Any help is appreciated.

Xinbing Liu

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Tanner EDA by Mentor Graphics
Process Variations in Microsystems Manufacturing
MEMStaff Inc.