You can contact Imtec Acculine in Sunnyvale, Calif. We are making PFA Teflon
coated stainless steel heated tanks with external blanket heaters. For long
KOH etch applications these can include condensing collars and lids that
will reduce etch rate changes due to evaporation. Static and recirculating
baths are available in various sizes and magnetic stir motors can be added
as well.

Contact Imtec Acculine
1295 Forgewood Ave.
Sunnyvale, CA 94089
Ph: 408-745-7800
Fax: 408-734-4883
email: [email protected]
web: www.imtecacculine.com

We have representatives throughout the US, Europe, and Asia who will be
happy to assist you with application details.

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Kuo Wu Cheng
Sent: Thursday, February 21, 2002 11:43 PM
To: [email protected]
Subject: [mems-talk] KOH etch instrument


Hi, everybody:

I recently study on the KOH etching Silicon. The silicon surface
roughness is very important for me. Who can introduce me some firms
producing very nice KOH bath(water circulating,clean automatically,control
of
flow field..etc.)
Thank you very much!!

BagelKuo
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