Most finite-element packages include preprocessors with graphical interfaces in
which you can define the geometry, material properties, boundary conditions, and
finite-element mesh for your model. Often, the geometry can be imported from a
CAD data file.

Both HKS ABAQUS (www.hks.com) and ANSYS/Multiphysics (www.ansys.com), among
others, can perform coupled field analyses involving piezoelectric materials.
More specialized packages include Magsoft's ATILA (www.magsoft-flux.com).

ANSYS in particular seems to be making an effort to tailor their product for
MEMS modeling. I would suggest you get a copy of their "Multiphysics Simulation
for MEMS" training manual.

To summarize, yes, there are modeling tools which should be applicable.

-- Emilio

-------- Original Message --------
> Date: Mon, 25 Feb 2002 13:44:06 -0700 (MST)
> From: Sushant Salgar 
> To: [email protected]
> Subject: [mems-talk] SAW Resonator Modeling
> Reply-To: [email protected]
>
> Hi,
> I would like to know if there is any software tool available to
> model SAW resonators.
> I understand that a basic SAW resonator can be modeled based on
> Coupling of Modes analysis (COM) and/or FEM techniques.
> I would like to know whether one has to start from scratch or can
> begin with a modeling tool.
> ...
>
> Sushant Salgar
> Research Assistant,
> Center for Solid State Electronics Research,
> Electrical Engineering Dept,
> Arizona State University.

-----------------------------------------------------------------------
Dr Emilio P. Calius
Research Engineer: Smart Materials and Structures
Industrial Research Limited
PO Box 2225, Auckland, New Zealand
Ph: +64 9 303 4116,     Fax: +64 9 307 0618