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MEMSnet Home: MEMS-Talk: Etchant for Cr
Etchant for Cr
1996-07-16
Behrouz Nikpour
1996-07-17
Alexander Holke
Etchant for Cr
Alexander Holke
1996-07-17
You can use any comercial Cr etchant used in mask fabrication.
HCl, let's say 10%, works if you touch the Cr with a less noble
metal (Al works fine). The electrochemical voltage dissolves the
oxide on the Cr which protects it initially. "Magic Touch" it is
also called.

Alexander Hoelke
University of Cincinnati
MEMS group


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