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MEMSnet Home: MEMS-Talk: Etch rates for all etchants
Etch rates for all etchants
2002-02-28
Amanpreet
2002-03-01
Abhinav Bhushan
Etch rates for all etchants
Amanpreet
2002-02-28
Hello

I am looking for the etch rates for all the processes and all the etchants
particularly with the anisotropic etchants and deep reactive ion etching. If
any one can give me information about this it will be of great help. thanks
for reading and your help

Amanpreet Singh

reply
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