issues related to integartion of MEMS with electronics
Manoj Wadhwa
2002-02-28
Hello!
Our company semiconductor complex ltd, India is diversifying into
manufacturing of MEMS devices. We are in the process of finalising the
equipment required.
Can anyone suggest what are issues related to integartion of MEMS with
electronics? Will we require some specific equipment to resolve these issues?
Thanks,
Manoj Wadhwa
Manager - VLSI
SCL - INDIA
WEB : www.sclindia.com/fab.html