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MEMSnet Home: MEMS-Talk: protection for glass etching
protection for glass etching
2002-03-01
Zigurts Majumdar
2002-03-04
Roger Shile
protection for glass etching
Zigurts Majumdar
2002-03-01
Hi,
        Right now we're using chrome-gold-chrome layers, 100A-150A-100A to
protect for glass etching. I noticed that if I do a BOE etch over 35
minutes, it starts to eat through the layers some and makes the channel
edges rough. I wondered if, in addition to thicker protective layers, the
preparation of the glass surface had an effect, say a SC-1/BHF clean
instead of H202:H2SO4.

THanks,

Ziggy

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