Dear Michael,

IntelliSense Corporation produces a thin-films material database and analysis
software called MEMaterial. MEMaterial incorporates an extensive database of
mechanical, electrical, and optical properties of materials used in
fabricating MEMS devices.  It does include Young's modulus for silicon
dioxide and silicon nitride.

It uses a multivariate estimation routine to predict/analyze material
properties as a function of the processing parameters prior to fabrication.
 Custom user process data also can be included. If you or anyone else has
questions about MEMaterial, feel free to contact me.

Sincerely,

James Marchetti,
[email protected]