A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Plasm-therm RIE temperature
Plasm-therm RIE temperature
2002-03-03
Devarajan Balaraman
2002-03-04
[email protected]
2002-03-05
[email protected]
Plasm-therm RIE temperature
Devarajan Balaraman
2002-03-03
Hi,

Deos anyone know how hot the substrate gets inside an RIE chamber when
you are etching  at a power of say 150 W.

Thanks.

Dev

__________________________________________________________________________


------------------------------------------------------------------------

Chat with friends online, try MSN Messenger: Click Here

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
MEMStaff Inc.
University Wafer
Mentor Graphics Corporation