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MEMSnet Home: MEMS-Talk: Problem in etching Al and Pt
Problem in etching Al and Pt
2002-03-04
Hoyin
2002-03-06
Greg Miller
2002-03-08
Yun-Ju Chuang
2002-03-13
Chan Ho Yin
Problem in etching Al and Pt
Hoyin
2002-03-04
 Hi all,

     I have got a simple question.   I want to sacrifically release my =
 device by etching Al. However, one of the layer is Pt. Will the Al =
 etchant etch Pt  ???  What etchant do you suggest??

 Thank you very much!!!

 Hoyin

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