You also need to make sure you are using IPA as a surfactant.  Read "Etching
roughness for (100) silicon surfaces in aqueous KOH", Palik et al., J. Appl.
Phys., v.70, p.3291.

Ted Harder
Research Assistant                      [email protected]
Caltech Micromachining Lab              http://mems.caltech.edu

Caltech 136-93                          ofc: (626) 395-3469
Pasadena, CA 91125                      fax: (626) 584-9104

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Ryan D. Pooran
Sent: Saturday, March 02, 2002 5:28 PM
To: [email protected]
Subject: [mems-talk] Smooth KOH etching


Good day all,
  Recently I did a KOH etching of Si to make a thin diaphragm to be used
as a pressure sensor. The diaphragm that was etched was very rough on
the backside. Does anyone know how I can etch Si so it gives an almost
perfect smooth surface?

Thank you.
Ryan

Ryan D. Pooran
Graduate Student
Microelectronics- Photonics Graduate Program
University of Arkansas
248 Physics Building
Fayetteville, AR
72701
Ph: 501-575-5596(O)
Ph: 501-575-4150(L)
Email: [email protected]
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