A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Plasm-therm RIE temperature
Plasm-therm RIE temperature
2002-03-03
Devarajan Balaraman
2002-03-04
[email protected]
2002-03-05
[email protected]
Plasm-therm RIE temperature
[email protected]
2002-03-05
Depending on the amount of time that the substrate is in the plasma it could
reach temperatures of >125 degrees C. Bob Henderson

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Nano-Master, Inc.
Tanner EDA by Mentor Graphics
Process Variations in Microsystems Manufacturing