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MEMSnet Home: MEMS-Talk: Pt deposition on glass or silicon
Pt deposition on glass or silicon
2002-03-05
Hongjun Zeng
2002-03-07
JAMES.R.THORPE
2002-03-06
Michael D Martin
2002-03-06
[email protected]
Pt deposition on glass or silicon
[email protected]
2002-03-06
You might try to do oxygen plasma clean prior to deposition and during the
deposition use an rf clean prior to Pt dep. Bob Henderson

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