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MEMSnet Home: MEMS-Talk: Problem in etching Al and Pt
Problem in etching Al and Pt
2002-03-04
Hoyin
2002-03-06
Greg Miller
2002-03-08
Yun-Ju Chuang
2002-03-13
Chan Ho Yin
Problem in etching Al and Pt
Greg Miller
2002-03-06
You might want to try AZ MIF 327 Photoresist developer - you might stand
a better chance of etching your Al film - its very slow but works quite
well.

Greg Miller
KVH

-----Original Message-----
From: Hoyin [mailto:[email protected]]
Sent: Monday, March 04, 2002 9:38 AM
To: [email protected]
Subject: [mems-talk] Problem in etching Al and Pt


 Hi all,

     I have got a simple question.   I want to sacrifically release my =
 device by etching Al. However, one of the layer is Pt. Will the Al =
 etchant etch Pt  ???  What etchant do you suggest??

 Thank you very much!!!

 Hoyin
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