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MEMSnet Home: MEMS-Talk: inertial sensor testing
inertial sensor testing
2002-03-07
ll
2002-03-07
Vic Kley
2002-03-07
Franck Alexis Chollet (Asst Prof)
inertial sensor testing
ll
2002-03-07
Dear group members,

Now I suffer a problem on inertial switch testing. My switch is made of
spring-mass structure which can sensitive to acceleration. When there is a
accelaration, the switch will be in ON state. Now I put it on a
shaker(sinusoidal input) to test it using the theory that the displacement
of my switch's mass will be larger when my switch is vibrating at its
resonant frequency. My switch's resonant frequency is about 18kHz (it is a
little high:). ), the mass need to travel 10micron to reach its ON state.

SO here comes my PROBLEM: I sweep my shaker output frequency from 100Hz to
20kHz BUT can't get any ON signal!!!

Does anyone has experience of this situation?

It can be vibrated at its resonant frequency even this frequency is high,
is that right?

Is 10 micron a large displacement for micro device to travel?

Is there other method to detect if the device does vibrate and also its
resonant frequency?

Please pay attension to my long story and give me wonderful reply:)

Best,

Vickie

reply
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