A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: how to etch SiO2 with RIE
how to etch SiO2 with RIE
2002-03-06
Peng Yao
2002-03-07
Roger Shile
2002-03-07
[email protected]
2002-03-08
Stefan Wiechmann
2002-03-14
Ravi Shankar
2002-03-07
Peng Yao
2002-03-08
[email protected]
2002-03-08
[email protected]
how to etch SiO2 with RIE
Roger Shile
2002-03-07
Most any fluorine based chemistry should work, CF4, SF6, etc.  If you want
selectivity over underlying Si, use CHF3.

Roger Shile

>>> [email protected] 03/06/02 05:01PM >>>
Hi all,
I am looking for a way to etch SiO2 with my RIE. What kind of gas is
necessary for this work.
Thank you very much!

leo
DOEs lab
Electrical Engineering Dept.
Univeristy of delaware
Newark D.E 19716
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.mems-exchange.org/

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
MEMS Technology Review
Nano-Master, Inc.
Harrick Plasma, Inc.