Frank, a real nice text on bonding is SCIENCE AND TECHNOLOGY OF
SEMICONDUCTOR WAFER BONDING by Gvsele and Tong, out of Duke.

ADAM


-----Original Message-----
From: "BERAUER,FRANK (HP-Singapore,ex7)" 
To: "'[email protected]'" 
Date: Thu, 7 Mar 2002 17:52:37 +0800
Subject: [mems-talk] Wafer Bonding Information?
Reply-To: [email protected]

Dear fellow MEMS researchers,

I would like to get an overview of wafer bonding techniques.
I am especially interested to know which materials can be bonded
together by which bonding techniques and what advantages and dis-
advantages there are. Also, which equipment manufacturers there
are. I would be grateful if somebody can point me to good sources
of information or literature.

Thanks and have a nice day,
        Frank Berauer
        Senior R&D Engineer
        Hewlett-Packard Singapore