Hi
 I am using Su-8 5 as a structural layer for my
device. I looked up Microchem website and they give
the exposure in terms of mJ/cm2. Is it possible to
find a rough estimate for exposure time on a
particular aligner using the mJ/cm2 data?

Also, I wanted to know if it possible to pattern
parylene?

Thanks,
Anshu mehta.
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