Frank,

Check out http://www.evgroup.com/products/waferbonding.htm

You'll find as well technical papers and other useful information.

Best regards,
Helge


                -----Original Message-----
                From:   BERAUER,FRANK (HP-Singapore,ex7)
[mailto:[email protected]]
                Sent:   Thursday, March 07, 2002 4:53 AM
                To:     '[email protected]'
                Subject:        [mems-talk] Wafer Bonding Information?

                Dear fellow MEMS researchers,

                I would like to get an overview of wafer bonding techniques.
                I am especially interested to know which materials can be
bonded
                together by which bonding techniques and what advantages and
dis-
                advantages there are. Also, which equipment manufacturers
there
                are. I would be grateful if somebody can point me to good
sources
                of information or literature.

                Thanks and have a nice day,
                        Frank Berauer
                        Senior R&D Engineer
                        Hewlett-Packard Singapore
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