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MEMSnet Home: MEMS-Talk: how to etch SiO2 with RIE
how to etch SiO2 with RIE
2002-03-06
Peng Yao
2002-03-07
Roger Shile
2002-03-07
[email protected]
2002-03-08
Stefan Wiechmann
2002-03-14
Ravi Shankar
2002-03-07
Peng Yao
2002-03-08
[email protected]
2002-03-08
[email protected]
how to etch SiO2 with RIE
[email protected]
2002-03-08
What you are trying to do is difficult. You will need to establish a 1:1 etch
rate oxide vs. photoresist. This will require a ratio around 50% CF4  50% O2.
Do you have instruments available to measure these films. Probably a Dektac
surface scanning system will work. Also I would recommend using a larger
substrate as cooling on the electrode becomes important during the etch
cycle. Bob

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