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MEMSnet Home: MEMS-Talk: High temperature - Solution with Diamond MEMS ?
High temperature - Solution with Diamond MEMS ?
2002-03-08
Ertl, Stephan
2002-03-08
David Nemeth
2002-03-08
Vic Kley
2002-03-11
Ertl, Stephan
High temperature - Solution with Diamond MEMS ?
Ertl, Stephan
2002-03-08
Hi !

Hot Stuff ! I really would like to know what you are working on. Your Web-Site
does not tell too much ...

Rick's idea of the diamond heat sink is nice. Diamond works pretty well up to
6000C in oxygen containing atmosphere, up to 12000C in vacuum or when
passivated (for higher temperatures it starts graphitizing). If you go to
higher temperatures it will work with some tricks, but soon reach its limits.

We developed a technology basis for Diamond MEMS (deposition of highly
oriented diamond on 2" Si wafers, surface and bulk micromachining, plasma
etching and so on)  and already realized several prototypes, including diamond
temperature sensors. They can be realized in a wide range of sensitivities. If
you think that diamond microstructures could be a solution to your problem
please contact us.

Hope this helps

Stephan Ertl
Director R+D
GFD Gesellschaft f|r Diamantprodukte mbH
89081 Ulm
Germany

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