You might also check out www.diamonex.com for diamond stuff...

David Nemeth
Senior Process Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Ertl, Stephan
Sent: Friday, March 08, 2002 10:57 AM
To: [email protected]
Cc: [email protected]; Rick Williston
Subject: AW: [mems-talk] High temperature - Solution with Diamond MEMS ?


Hi !

Hot Stuff ! I really would like to know what you are working on. Your
Web-Site
does not tell too much ...

Rick's idea of the diamond heat sink is nice. Diamond works pretty well up
to
6000C in oxygen containing atmosphere, up to 12000C in vacuum or when
passivated (for higher temperatures it starts graphitizing). If you go to
higher temperatures it will work with some tricks, but soon reach its
limits.

We developed a technology basis for Diamond MEMS (deposition of highly
oriented diamond on 2" Si wafers, surface and bulk micromachining, plasma
etching and so on)  and already realized several prototypes, including
diamond
temperature sensors. They can be realized in a wide range of sensitivities.
If
you think that diamond microstructures could be a solution to your problem
please contact us.

Hope this helps

Stephan Ertl
Director R+D
GFD Gesellschaft f|r Diamantprodukte mbH
89081 Ulm
Germany
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