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MEMSnet Home: MEMS-Talk: chrome gold electrodes on a PZT layer
chrome gold electrodes on a PZT layer
2002-03-12
Rajsekhar Popuri
chrome gold electrodes on a PZT layer
Rajsekhar Popuri
2002-03-12
Hi,

I am trying to deposit chrome-gold electrodes on a thin PZT layer.

Do anyone have an idea whether chrome will diffuse into the PZT layer.Can i
strip off the chrome-gold elctrodes using thier respective etchants without
having any effect on the PZT layer.

Any information is appreciated.

Thanks
Raj.

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