I'd like to answer the question, but hesitate to do so because you have to
define what is mems in your mind first. It's getting confusing these days that
when you go to MEMS conference, everything is mems -- big mems, mini mems, semi
mini mems, micro mems, etc. If you mean integrated, microfabricated,
surface-micromachined, thin-film based, electromagnetic, sub-millimeter size
mems, my actuator should have demonstrated the largest out of plane
displacement. In case I'm wrong, would you please let me know whoelse has done
better.