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MEMSnet Home: MEMS-Talk: How to remove residual SiNx ?
How to remove residual SiNx ?
2002-03-13
Wu-Cheng Kuo
2002-03-13
Mighty Platypus
2002-03-14
[email protected]
How to remove residual SiNx ?
[email protected]
2002-03-14
rie etch with SF6 should do the trick. Try 250 millitorr as a partial
pressure using the mass flow controller to get to that pressure. Should be
around 40 sccm of SF6 gas. Power level of 150 watts with a reflective of <10
watts should give descent uniformity of Nitride etch. Bob Henderson

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