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MEMSnet Home: MEMS-Talk: Pt RIE?
Pt RIE?
2002-03-19
Michael D Martin
Pt RIE?
Michael D Martin
2002-03-19
Hi all,
   Can anyone recommend chemistry and parameters for anisotropically
plasma etching Pt/Ti or Pt/Cr using a positive resist? The reactor is
parallel plate at 13MHz. I'm currently using 1813 but that can change.

Thanks,
    Mike

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