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MEMSnet Home: MEMS-Talk: oxide sharpening of silicon
oxide sharpening of silicon
2002-03-19
杨尊先
oxide sharpening of silicon
杨尊先
2002-03-19
all mems members :


         I am a student in a chinese institute,  now I want to find some ways to
sharpen my silicon tips which are etched in KOH solution ,
can anybody tell me how to control the tip shape without affecting the sharpness
of the tips and  the height of  those


yours sinceresly

2002.3.20

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