hi mems-talk members !

did someone knows any CAD (computer aided design) tool to make a grey scale mask
(also called half tone mask), for lithography applications and micromachining ?
In fact, I could get access to L-Edit, Mems Pro, Intellisuite and may be
MemsExpert (from Coventor) softwares. And I am wondering if there is any kind of
option provided in these tools, which allow me to make this kind of gradually
toned masks. If not is there any other design tool, which could help in that
matter ?

Thank you everybody for your help.

Sofiane



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