Hi Amanda,

we have coated the side walls of an SU-8 channel structure with a couple of
different metal, platinum and copper included.   We used a shadow mask type
process with a stainless steel stencil as the mask.  There were some problems
with the metal spreading into the channel, which we resolved by using channel
inserts.
I have some cross-sections if you'd like to take a look at them I can forward
the images.

all the best,

Helen.

Dr Helen Berney, MIEEE MEBF
National Microelectronics Research Centre, Prospect Row, Cork, Ireland
Tel +353-21-4904010   Fax 353-21-4270271   Email [email protected]
Webpage  http://www.nmrc.ie/research/transducers-group/index.html



Amanda Plimmer wrote:

> Hi
>
> Does anyone out there have any experience of plating a metal ( I am trying
> copper) into the structure of SU-8? What technique is used and what results
> are obtained? Hope someone can help!
>
> Amanda Plimmer
> Denning Group
> Inorganic Chemistry Lab
> University of Oxford
>
> ------------------------------------------------
> Amanda Plimmer
> Lincoln College
> Turl St
> Oxford
> OX1 3DR
>
> 07899 988238
> internal ext. 20979
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