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MEMSnet Home: MEMS-Talk: MEMS die post-processing...
MEMS die post-processing...
2002-03-21
iog
2002-03-21
Michael D Martin
2002-03-22
Frye Jeffrey-G11523
MEMS die post-processing...
iog
2002-03-21
Hi!

Can anybody give me information on service that provides laser cutting of MEMS
dies? I need to cut smaller die out of 3*3 mm MEMS die. The MEMS stack is 0.5
mm Si wafer and 0.5 mm anodically bonded glass.

Thank you,

Igor

reply
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