I understand that those few exposure tools that support it (e.g.
Heidelberg DWL66 Laser Pattern Generator), treat different gray scales
as different layers in your design package.
So use multiple layers.

-Mike

>>> [email protected] 03/22/02 12:03AM >>>
Hi Sofina,

To my best knowledge it is not in any MEMS program. Most important
reason I
think is that it is not supported by the machines that make the masks,
and
the languages that are used to decribe masks (GDS, CIF). The solution
would
be to devide every structure into tiny dots and then export to GDS but
that
would explode the file size !

Niels Olij
Alcatel Optronics Netherlands


hi mems-talk members !

did someone knows any CAD (computer aided design) tool to make a grey
scale
mask (also called half tone mask), for lithography applications and
micromachining ? In fact, I could get access to L-Edit, Mems Pro,
Intellisuite and may be MemsExpert (from Coventor) softwares. And I am
wondering if there is any kind of option provided in these tools,
which
allow me to make this kind of gradually toned masks. If not is there
any
other design tool, which could help in tmatter ?

Thank you everybody for your help.

Sofiane
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