A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Etch oxide not nitride
Etch oxide not nitride
2002-03-26
Zann
2002-03-26
[email protected]
2002-03-26
[email protected]
Etch oxide not nitride
[email protected]
2002-03-26
Buffered oxide etchant of around 6:1 ammonium Fluoride+ di water will work
well for etching oxide but not nitride. Bob Henderson

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
Nano-Master, Inc.
Tanner EDA by Mentor Graphics
Mentor Graphics Corporation