Greetings Chan Ho,
What you're probably seeing is the result of film stress, not any sort of
fluid force. You'll probably be able to find some information about stress
reduction in Madou, Kovacs, Trimmer, or possibly even Maluf. By the way,
what material are you depositing on top of Aluminum (to make your beams)?

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 18-121, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Battery is safe if not provoked." -- _Batteries in a Portable World_

On Tue, 26 Mar 2002, Chan Ho Yin wrote:

> Hi all,
>
>      I am a beginner in MEMS field and I am now fabricating a simple
> cantilever beam. The sacrifical layer is Al (~2um). The beam thickness is
> ~0.5um and length is ~500um.   When I tried to release the structure using
> AZ300 PR developer, I found that the released beam will bent or twist due
> to the force caused by the fluid flow (PR developer).
>
>    Even I hold the sample carefully, the beam still bent or twist when I
> tried to pull the sample out of the solution. It can't stand straight. What
> should I do? Is there any technique in handling this??  I guess this might
> too simple to you. But it is important to me.  Can you suggest me with
> detailed steps?  Thank you very much!!!!
>
> Yours,
> Hoyin
>
>
>
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