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MEMSnet Home: MEMS-Talk: Direct write UV laser scanning
Direct write UV laser scanning
2002-03-26
[email protected]
2002-03-28
Michael D Martin
Direct write UV laser scanning
[email protected]
2002-03-26
Hi memsnet

I am looking for information about UV laser scanning systems for writing
patterns onto photoresist directly from digital artwork. Such a system would
consist of a UV laser, a modulator to control the UV dose and a scanning
head. A search of the web locates many references to systems like this but
there do not seem to be any suppliers mentioned.

I would be grateful for any information about what is around and who can
supply it.

Regards

Tim Davis
CSIRO
Australia.

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